JPH031531U - - Google Patents
Info
- Publication number
- JPH031531U JPH031531U JP6143789U JP6143789U JPH031531U JP H031531 U JPH031531 U JP H031531U JP 6143789 U JP6143789 U JP 6143789U JP 6143789 U JP6143789 U JP 6143789U JP H031531 U JPH031531 U JP H031531U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- plasma processing
- holder
- sample holder
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989061437U JPH0747866Y2 (ja) | 1989-05-26 | 1989-05-26 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989061437U JPH0747866Y2 (ja) | 1989-05-26 | 1989-05-26 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH031531U true JPH031531U (en]) | 1991-01-09 |
| JPH0747866Y2 JPH0747866Y2 (ja) | 1995-11-01 |
Family
ID=31589686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989061437U Expired - Lifetime JPH0747866Y2 (ja) | 1989-05-26 | 1989-05-26 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0747866Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132510A (ja) * | 1984-07-25 | 1986-02-15 | Hitachi Ltd | 基板の温度制御機構 |
-
1989
- 1989-05-26 JP JP1989061437U patent/JPH0747866Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132510A (ja) * | 1984-07-25 | 1986-02-15 | Hitachi Ltd | 基板の温度制御機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0747866Y2 (ja) | 1995-11-01 |